报告题目：Industrial applications of oxygen plasmas

报 告 人：Prof. Miran Mozeti?, Head of Department of Surface Engineering and Optoelectronics, Jozef Stefan Institute, Ljubljana, Slovenia

报告时间：2018年1月9日（星期二）10:30

报告地点：理学院报告厅（理-352）

报告内容：

Oxygen plasma represents a powerful medium for oxidation of any material due to abundance of highly reactive species including positively charged molecular and atomic ions and neutral atoms in ground as well as metastable excited states. Plasma close to thermal equilibrium is excited by powerful discharges created at atmospheric or sub-atmospheric pressure. Such plasma of high power density allows for rapid synthetization of metal oxide nanoparticles of selected morphology, especially metal-oxide nanowires or nanoflakes which are used in molecular adsorption and separation, catalysis, sensing, optics, sequestration of pollutants, drug delivery, and renewable energy. Many other materials do not stand heating to elevated materials so non-equilibrium plasma of low kinetic temperature but high chemical reactivity performs better. Although non-equilibrium plasma can be sustained at atmospheric pressure it is not practical due to a short life-time of reactive gaseous species so the high concentration of plasma species is limited to the rather small volume where electrical field is present. For treatment of large materials at room or little elevated temperature low-pressure plasma performs better. Low-pressure plasma is usually sustained by electrode-less discharges at high frequency in chambers made from dielectrics of low coefficient for heterogeneous surface recombination of neutral atoms. Properly designed reactors allow for dissociation fractions of oxygen molecules above 10% at negligible density of charged particles in large discharge chambers. Such plasma or its afterglow is particularly suitable for activation of materials prior deposition of various coatings, tailoring surface properties of composite materials by selective removal of one or more components, nanostructuring of originally smooth materials and even treatment of seed, bulbs etc. for application in agriculture. Several examples of such industrial applications of oxygen plasma will be presented and key parameters allowing for optimal finishing of selected materials discussed.

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注：本次讲座将纳入物理系继续教育课程。

理学院

2018年1月8日